Patent holdings for IPC class G01L 21/32

Total number of patents in this class: 33

10-year publication summary

2
6
6
0
1
1
1
2
2
0
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
MKS Instruments, Inc.
698
11
ULVAC, Inc.
1448
5
INFICON AG
20
3
Canon Anelva Corporation
676
2
INFICON GmbH
59
2
Vaclab Inc.
5
2
Xerox Corporation
7503
1
National Institute of Advanced Industrial Science and Technology
3677
1
Brooks Automation, Inc.
191
1
Keysight Technologies, Inc.
1170
1
Sumitomo Heavy Industries, Ltd.
1670
1
Chemring Sensors and Electronic Systems, Inc.
39
1
Vacuum Products Corporation
1
1
GSI Helmholtzzentrum für Schwerionenforschung GmbH
83
1
Other owners 0